Room-temperature GaAs/InP wafer bonding with extremely low resistance
Low-temperature direct wafer bonding is a promising technique for fabricating multijunction solar cells with more than four junctions in order to obtain high conversion efficiencies. However, it has been difficult to reduce the bond interface resistance between a GaAs-based subcell wafer and an InP-based subcell wafer. We found that a novel bonding structure comprising heavily Zn-doped (1 ×1019 cm−3) p+-GaAs and S-doped (3 × 1018 cm−3) n-InP had an interface resistance of 2.5 × 10−5 Ωcm2, which is the lowest value ever reported. This result suggests that the newly developed room-temperature wafer bonding technique has high potential to realize high-efficiency multijunction solar cells.
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