The visco-plastic model developed in part I of this work is used
here to study the dislocation evolution in high pressure Czochralski growth of
InP single crystals. Towards this an in-house computational fluid dynamics code
MASTRAPP is linked to the ABAQUS software. MASTRAPP has the capability to
predict the thermal field history in the Czochralski furnace throughout the
growth period. The thermal loading history determined through MASTRAPP is fed
to ABAQUS and the visco-plastic constitutive equations are integrated while
maintaining force equilibrium in the growing crystal. The combined model
predicts the final dislocation densities in the crystal at the end of the
growth period. It is then used to study and predict the effect of various
parameters and phenomena on the final dislocation densities—thermal shock, gas
convection, height of boric oxide encapsulant layer, marginal roles of thermal
radiation and melt convection, and the cool down period. Gas convection is
found to have the most significant effect on the dislocation densities.
Source:IOPscience
For more information, please visit our website:
send us email at sales@powerwaywafer.com and powerwaymaterial@gmail.com
没有评论:
发表评论